000 00602nam a2200181Ia 4500
020 _a0470297395
245 _aProjected range statistics
_bsemiconductors and related materials
_cJames F. Gibbons, William S. Johnson and Steven W. Mylroie
260 _aPennsylvania
_bDowden, Hutchinson and Ross
_c1975
300 _av.p.:ill.
082 _aR
_b539.721 G441P,2
690 _aParticle range (Nuclear physics): Ion bombardment
690 _aSemiconductors
690 _aIon implantation
700 _aJohnson, William S.
700 _aMylroie, Steven W.
100 _aGibbon, James F.
250 _a2nd
999 _c59926
_d59926